Technology

The LPE-technology of ESY-8 is based on a quartz-boat sliding-technique. The boat consists of 4 stacks, each containing a substrate-plate with 18 hollows for the substrates and melts, a movable slit-plate to cover the melt during layer-growth, and a crucible for the melt and poly-GaP.

NH₃ is added during layer-growth to dope the active layer with Nitrogene. The pn-junction and the p-layer is formed by evaporation of metallic Zinc-balls, which are injected into the reactor in adjustable quantities.