Procedure for Multi-Layer Epitaxial Process

equipment furnace oven lpe diffusion lcd pdp fpd glass flat panel h2 hydrogen gas purifier pd purification palladium heat treatment

A. Filling melt 1 into melt chambers of movable graphite plates.
B. Moving melt 1  to growth-position above wafer. Filling Melt 2 into next melt chambers.
C. Removing melt 1. Moving Melt 2 to growth position above wafers. Filling Melt 3 into next melt chambers e.t.c.

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